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Gaussian beam1
e-beam writer1
elektronový litograf1
gaussovský svazek1
laser interferometry1
laserová interferometrie1
micro-electromechanical system1
mikro-elektro-mechanický systém1
reactive ion etching1
reaktivní iontové leptání1
tvarovaný proměnný svazek1
variable shaped beam1

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THE LINDAT/CLARIAH-CZ PROJECT (LM2023062; formerly LM2010013, LM2015071, LM2018101) IS FULLY SUPPORTED BY THE MINISTRY OF EDUCATION, SPORTS AND YOUTH OF THE CZECH REPUBLIC UNDER THE PROGRAMME LM OF "LARGE INFRASTRUCTURES"