Larvae of 13 species of the bembidiine subtribes Tachyina (the genera Tachyta Kirby, Tachys Dejean, Polyderis Motschulsky, Elaphropus Motschulsky, Sphaerotachys G. Müller, Paratachys Casey, Porotachys Netolitzky) and Xystosomina (the genus Mioptachys Bates) were studied. Larvae of all studied taxa are described, diagnosed and illustrated. A key to genera is provided separately for the first- and older-instar larvae. Monophyly and phylogenetic position of the subtribes and genera are discussed on the basis of presumably apomorphic character states of larvae. Based on at least six synapomorphic character states the subtribes Tachyina and Xystosomina appear to form a monophyletic group. On the other hand, there are no synapomorphies to propose a sister-group relationship between Tachyina and Xystosomina within the supertribe Trechitae.