1. Numerical optimization of the capacitive micro-switch
- Creator:
- Kovács, Ádám
- Format:
- bez média and svazek
- Type:
- model:article and TEXT
- Subject:
- capacitive micro-switch, MEMS, FEM, and optimization
- Language:
- English
- Description:
- The paper deals with design optimization of a capacitive micromachined switch consisting of a thin membrane suspended over a central conductor. The aim is to achieve as small necessary electrostatic pull-in force as possibble while ensuring fast switching. Optimum parameters are searched using fast linear and nonlinear beam models verified by the finite element method. and Obsahuje seznam literatury
- Rights:
- http://creativecommons.org/licenses/by-nc-sa/4.0/ and policy:public